My key activity in this area is the work on photonic crystals. These are periodic microstructures, typically realised in seminconductors such as silicon or GaAs/InP, that control the emission and propagation of light. The periodicity is of order 300-400 nm, but to control their specific function and achieve the best performance,we need to control size and fabrication tolerances, including roughness, down to a few nanometres. See an example for a photonic crystal cavity in the attached figure; some of the holes around the centre have been deliberately distorted and displaced to achieve a cavity with a particularlty high quality factor. If all the holes were the same, the performance would be much lower.
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