[nanoPost] Ultra Thin Coating Deposition for nano scale devices

Our systems are used to deliver precursor chemicals in precise amounts onto extremely small features, either on sample scale or wafer scale. A range of standard materials are available, also we have developed several customer specific processes. These films are ultra thin and very conformal, and are used to functionalise a surface to deliver a desired performance.

Using vapour phase allows the replacement of liquid bulk processing and consequently allows much greater process control and is much more environmentally friendly with optimised materials usage and minimised by-products.

Vapour phase also allows smaller features to be succesfully coated where liquids may not reach or will leave residues. An integrated plasma chemistry capability is used to enhance adhesion properties and promote reactions, for more robust films and faster process times.