[nanoPost] Move and Measure with Nanometre Precision

Company UK

We have extensive experience in identifying the right combination of nanopositioning mechanics and electronics in a diverse range of markets including semiconductor, biotechnology, microscopy, optoelectronics, defence and metrology.  Where detailed discussion is required an on site visit by a technical specialist can be arranged.

A piezoelectric, solid state actuator is resolution limited only by the noise of the voltage amplifier being used to drive it.  An amplifier with a noise floor of better than one part in 10000, therefore, can control a 100 micron travel actuator with a minimum incremental motion of better than 1 nanometre. 

Running in open loop a piezo actuator will drift and show a hysteresis of up to 15%.  For precise control of position a closed loop system incorporating feedback metrology is therefore required.  Capacitive sensor technology, where an electric field is used to measure capacitance change between the probe and target surfaces, can measure absolute position with sub nanometre resolution.  Single plate and dual plate sensor technologies are available and are the sensor of choice for the most demanding of positioning applications. 

In our portfolio we have a diverse range of nanopositioning and position measuring solutions including:

• Piezo actuators
• Piezo driven nanopositioning stages from one to six axes
• Capacitive sensors for sub nanometre position measurement
• Piezo amplifers and closed loop controllers

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